Recently, China Electronics Technology Group Co., Ltd. (hereinafter referred to as electrical equipment) came good news, independent research and development of China's first beam ion implantation machine in the SMIC production line stable film more than 2 million, the first 200mmCMP Equipment sales. This is a microcosm of the major achievements made by the electric equipment company in undertaking the major projects of "large-scale integrated circuit manufacturing equipment and complete sets of technologies" (hereinafter referred to as the "02 Special Projects"). In the past nine years, E-Tech has undertaken a total of 02 special projects, "Research and Development of 90-65nm High Angle Ion Implanter and Its Industrialization", "Key Components and Core Technologies of Packaging Equipment", "Development and Industrialization of 45-22nm Low Energy Large Beam Ion Implanter" 28-14nm polishing equipment and complete sets of technology, industrialization of materials, "" 300mm thin wafer polishing machine R & D and industrialization "and other projects. Over the past 9 years, with the support of Special Project 02, the electric equipment has successively broken through the core technologies of key integrated circuits such as ion implanters and chemical mechanical polishing machines (CMPs), which have made it difficult to tackle difficulties and motivated. They have also obtained the invention patent authorization 146 Items, won the provincial and ministerial level awards 22; built in line with SEMI standard ion implanter batch manufacturing platform, the establishment of post-doctoral research station; CMP R & D platform approved "Beijing Chemical Machinery Flattening Process Equipment Engineering Research Center" Domestic first ion implanter, 200mmCMP equipment into the SMIC's large production line, advanced packaging equipment with integrated service capabilities, access to advanced packaging leading enterprises ...... Diligently describe the responsibility and responsibility of the foundation stone Integrated circuit chips are the core cornerstone of the information age. Integrated circuit manufacturing technology represents the highest level of ultra-precision manufacturing in the world today. The integrated circuit industry has become a strategic industry that affects social security, economy and national defense security and overall competitiveness. However, due to the capital-intensive, technology-intensive and talent-intensive IC industries, for a long time, the IC industry in China has been subject to various restrictions in the advanced manufacturing equipment, materials and processes in the West. The high-end chips mainly rely on imports. China's annual output of integrated circuit products for many years more than 200 billion U.S. dollars, more than oil to become the largest imported products. In order to realize the independent innovation and development, in 2008, the state started the special project of 02 and focused on the independent innovation of equipment, process and materials. Zhang Beixu, director of Beijing Economic Commission, said that high-end equipment and materials have filled the industrial chain from scratch, and that the manufacturing process and package integration have been gradually changing from weak to strong to participate in international competition. This shows that the national science and technology major project is creating an innovation system for integrated circuit manufacturing Sexual goals have been achieved. In the vigorous development of China's IC industry in recent years, major projects have played a significant role in innovation leadership and technical support. In 02 special high-end equipment research, electrical equipment has played a pivotal role. E-Tech is a wholly-owned subsidiary of China Electronics Technology Group Corporation (hereinafter referred to as China Electonics), established in 2013 by the integration of two E-Techco, Forty-five and Forty-eight and its 11 holding companies , Across Beijing, Taiyuan, Changsha, Shanghai and other six provinces and eight parks. Since the founding of the establishment, the electric equipment held high the flag of the national team of electronic manufacturing equipment, carry forward the hard work, talk about dedication, willing to adhere to the "ten years grinding sword" equipment, according to "key breakthroughs, platform support, partial package, integrated services" Development ideas, adhere to innovation and development, adhere to the integration of civil and military, adhere to the equipment to serve the country, overcome the integrated circuit manufacturing key equipment ion implanter, chemical mechanical polishing equipment and other key technologies to solve a group of China's military electronic components to control the development of " Card neck "problem, supporting the rapid development of semiconductor and emerging electronic components industry, to express the responsibility and responsibility of the Great Power Equipment. Relying on the accumulation of technology in the field of integrated circuit core equipment for many years and the scientific research and production technology of military industry, the electric equipment has formed a local complete set and integrated service capability of high-end display, new energy sources of photovoltaic, power semiconductor materials and other pan-semiconductor equipment, and greatly improved the equipment localization rate. At present, it is the major integrated circuit equipment, the largest high-end display equipment, photovoltaic manufacturing equipment, power battery material manufacturing equipment suppliers, with the integrated circuit of local complete sets and system integration capabilities, with a complete photovoltaic industry chain and turnkey capacity of the entire line. Break the monopoly forging ion implantation machine made brand Breakthrough in key technologies, made 101 invention patents, 2 international patents, has achieved a series of products and used in SMIC 90nm, 55nm, 40nm, 28nm process line ... ... This is the electrical equipment to undertake 02 special two ion implantation machine research and development Some achievements made by the project. Ion implanters are the core equipment of integrated circuit manufacturing - mainly injecting particles into the semiconductor material to control the conductivity of the semiconductor material to form the basic unit of the integrated circuit device such as the PN junction. As the only one that integrates R & D, manufacturing and service in one ion implanter, after having undertaken the 02 special project, the electrical equipment has taken a new step in the R & D of ion implanter. In 2014, the 12-inch medium beam ion implanter passed the acceptance inspection organized by the State 02 Specialized Implementation Management Office at an excellent level. In 2015, SMIC has successively completed the process verification of small batch products at 55nm, 45nm and 40nm. The first Chinese domestic beam ion implantation machine has been the first to achieve mass production of over one million wafers. In 2016, the new 45-22nm low-energy large-beam ion implanter that meets the high-end technology was introduced. The middle-beam and low-energy large-beam products were mass-produced for the IC main line. In 2017, the ion implanter will be put into production in batches of manufacturing plants and process laboratories. With its SEMI-compliant industrialization platform, the annual production capacity of the ion implanter will reach 50, and the information management system will be used to realize the quality control and traceability of the ion implanter. "Accumulation thick device, for the equipment manufacturing industry, not only concerned about the development of a single device, within a certain range of complete supply, the formation of a platform for the production capacity is even more important." Liu Jidong, chairman and party secretary stressed that the electrical equipment Independent research and development of ion implanters broke the monopoly of the high-end market by the United States and Japan, creating a domestic brand ion implanter.